Building 63 room 222
Tel:
08-6479368
Head: Mr. Jurgen Jopp - CV
Ellipsometers shine polarized light onto a sample and measure the
change in the state of the polarization induced by the sample. (Because
the most general state of polarization is elliptical polarization,
the instrument is called ellipsometer.)
From such measurements we can deduce values for the optical constants
of a material (if the sample is a simple substrate) or the thickness
and optical constants of a thin film (if the sample is a substrate
material covered by one or more thin films).
The sensitivity is excellent. However, as ellipsometry is an indirect
method, problems can arise from the correlation between the unknown
sample parameters.
This spectroscopic ellipsometer acquires in a single measurement
1024 data pairs over its whole spetral range in less than a minute.
Model: SE 800 (Sentech)
Accessories: Compensator, microspot, automated goniometer,
automated sample stage with mapping software
Measurment: Fast, non-distructive, non-contact measurement
Measured quantities: Del, Psi (ellipsometric
angles)
R, T (Reflectivity, Transmission)
Sample size: Max. diameter 6”, max. thickness
7 mm
Lateral resolution: The signal is collected from
an area of 2 mm * 6 mm (0.3mm * 1mm with the microspots)
Spectral range: 280 nm – 850 nm (330 nm –
850 nm with UV-filter )
Spectral resolution: < 1 nm (1024 element photodiode
array)
Angle of incidence: Variable, from 40 to 75 degrees
(motorized goniometer)
Applications: Information is found at www.sentech.de
