{"id":148,"date":"2021-09-11T11:26:01","date_gmt":"2021-09-11T11:26:01","guid":{"rendered":"http:\/\/nurit.local\/?page_id=148"},"modified":"2021-09-11T11:27:41","modified_gmt":"2021-09-11T11:27:41","slug":"controlled-fabrication-of-nanopores-by-focused-electron-beam-induced-etching","status":"publish","type":"page","link":"http:\/\/nurit.local\/controlled-fabrication-of-nanopores-by-focused-electron-beam-induced-etching\/","title":{"rendered":"Controlled fabrication of nanopores by focused electron beam induced etching"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"148\" class=\"elementor elementor-148\" data-elementor-settings=\"[]\">\n\t\t\t\t\t\t\t<div class=\"elementor-section-wrap\">\n\t\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-35f33103 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"35f33103\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-top-column elementor-element elementor-element-1e02612d\" data-id=\"1e02612d\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6d5cd3ff elementor-widget elementor-widget-image\" data-id=\"6d5cd3ff\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img width=\"150\" height=\"150\" src=\"http:\/\/nurit.local\/wp-content\/uploads\/2021\/09\/BGU-LOGO-ROUND-White-150x150.png\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\" loading=\"lazy\" srcset=\"http:\/\/nurit.local\/wp-content\/uploads\/2021\/09\/BGU-LOGO-ROUND-White-150x150.png 150w, http:\/\/nurit.local\/wp-content\/uploads\/2021\/09\/BGU-LOGO-ROUND-White-300x300.png 300w, http:\/\/nurit.local\/wp-content\/uploads\/2021\/09\/BGU-LOGO-ROUND-White.png 450w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-66 elementor-top-column elementor-element elementor-element-28ade627\" data-id=\"28ade627\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7d0c0a8f elementor-widget elementor-widget-heading\" data-id=\"7d0c0a8f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">Prof. Nurit Ashkenasy - Research Group<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4ef1ac06 elementor-widget elementor-widget-heading\" data-id=\"4ef1ac06\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Bio-Electronics and Bio-Sensors<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5fc81a2a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5fc81a2a\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-723be741\" data-id=\"723be741\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t\t\t<div class=\"elementor-element elementor-element-676987f4 elementor-widget elementor-widget-image\" data-id=\"676987f4\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img width=\"482\" height=\"294\" src=\"http:\/\/nurit.local\/wp-content\/uploads\/2021\/09\/image1134.jpg\" class=\"attachment-large size-large\" alt=\"\" loading=\"lazy\" srcset=\"http:\/\/nurit.local\/wp-content\/uploads\/2021\/09\/image1134.jpg 482w, http:\/\/nurit.local\/wp-content\/uploads\/2021\/09\/image1134-300x183.jpg 300w\" sizes=\"(max-width: 482px) 100vw, 482px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-2704c16a elementor-section-boxed elementor-section-height-default 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preset-1\"><ul id=\"menu-main\" class=\"eael-simple-menu eael-simple-menu-dropdown-animate-to-top eael-simple-menu-indicator eael-simple-menu-horizontal\"><li id=\"menu-item-33\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-home menu-item-33\"><a href=\"http:\/\/nurit.local\/\">Home<\/a><\/li>\n<li id=\"menu-item-32\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-32\"><a href=\"http:\/\/nurit.local\/research\/\">Research<\/a><\/li>\n<li id=\"menu-item-31\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-31\"><a href=\"http:\/\/nurit.local\/publications\/\">Publications<\/a><\/li>\n<li id=\"menu-item-30\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-30\"><a href=\"http:\/\/nurit.local\/group\/\">Group<\/a><\/li>\n<li id=\"menu-item-29\" class=\"menu-item menu-item-type-post_type menu-item-object-page menu-item-29\"><a 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data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2e253bea elementor-widget elementor-widget-heading\" data-id=\"2e253bea\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Controlled fabrication of nanopores by focused electron beam induced etching\n\n\n<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7fae2d18 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"7fae2d18\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-17b0e65 elementor-widget elementor-widget-text-editor\" data-id=\"17b0e65\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>In the cellular system, protein based nanopores (NPs) and nano-channels are being used for controlled transfer of ions and bio-molecules through the cell membrane. Our aim is to mimic this system in an artificial surrounding in which we can study the interactions between the molecules and the NPs\u2019 rims during the transit and exploit them in biosensing applications. Toward this aim we have recently developed a novel focused electron beam induced etching (FEBIE) process, in which the chemical etch of silicon nitride by XeF<sub>2<\/sub> gas is enhanced by an electron beam, facilitating localized reactions. This process eliminates the need for high energy electrons of transmission electron microscope (TEM) or focused electron beam (FIB), making it more accessible. We have explored the effects of several process variables, such as time, pressure, and electron energy, on the etching process, and have gained understanding of the NP formation mechanism and the resulting 3-dimensional structure. We are now able to controllably manufacture apertures with size ranging from 15 to 200 nm diameter in silicon and silicon nitride membranes. This work has been published in two manuscripts in the journal <i>Nanotechnology,<\/i> in <a href=\"http:\/\/iopscience.iop.org\/0957-4484\/20\/24\/245302?fromSearchPage=true\">2009<\/a> and <a href=\"http:\/\/iopscience.iop.org\/0957-4484\/22\/28\/285303?fromSearchPage=true\">2011<\/a>. Future work will focus on the application of the nanopores for biosensing and related applications.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a3e307b elementor-widget elementor-widget-image\" data-id=\"a3e307b\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img src=\"http:\/\/nurit.local\/wp-content\/uploads\/elementor\/thumbs\/7-pcyeiqm8zh1ay0dk2ps4iiwnpzoc5gfrdkl3e5i80k.png\" title=\"7\" alt=\"Top view TEM bright field image of nanopores prepared by FEBIE is shown in A, together with thickness map extracted from the EELS signal (B). A cross section of the membrane thickness obtained from the EELS (C) signal and AFM image (D) and its cross section have allowed us to determine the shape of the nanopores as illustrated in the inset of panel C.\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Top view TEM bright field image of nanopores prepared by FEBIE is shown in A, together with thickness map extracted from the EELS signal (B). A cross section of the membrane thickness obtained from the EELS (C) signal and AFM image (D) and its cross section have allowed us to determine the shape of the nanopores as illustrated in the inset of panel C.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d48fc01 elementor-align-center elementor-widget elementor-widget-button\" data-id=\"d48fc01\" data-element_type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t<a href=\"http:\/\/nurit.local\/research\/\" class=\"elementor-button-link elementor-button elementor-size-xl\" role=\"button\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t<span class=\"elementor-button-text\">Back to previous page<\/span>\n\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Prof. Nurit Ashkenasy &#8211; Research Group Bio-Electronics and Bio-Sensors Home Research Publications Group Positions News Links Controlled fabrication of nanopores by focused electron beam induced etching In the cellular system, protein based nanopores (NPs) and nano-channels are being used for controlled transfer of ions and bio-molecules through the cell membrane. Our aim is to mimic [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"elementor_canvas","meta":[],"_links":{"self":[{"href":"http:\/\/nurit.local\/wp-json\/wp\/v2\/pages\/148"}],"collection":[{"href":"http:\/\/nurit.local\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/nurit.local\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/nurit.local\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/nurit.local\/wp-json\/wp\/v2\/comments?post=148"}],"version-history":[{"count":4,"href":"http:\/\/nurit.local\/wp-json\/wp\/v2\/pages\/148\/revisions"}],"predecessor-version":[{"id":153,"href":"http:\/\/nurit.local\/wp-json\/wp\/v2\/pages\/148\/revisions\/153"}],"wp:attachment":[{"href":"http:\/\/nurit.local\/wp-json\/wp\/v2\/media?parent=148"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}